#chip[1] x[2] sig_x[3] y[4] sig_y[5] theta[6] sig_theta[7] f[8] sig_f[9]
si001s	 0.00 0.00 0.00 0.00 0.000000 0.000000 1.000 0.000
si002s	 -16.76 1.05 4100.68 0.15 -0.005141 0.000030 1.037 0.008
si005s	 -2116.54 0.09 -14.42 0.57 -0.000439 0.000029 1.018 0.005
si006s	 -2085.33 1.13 4080.92 0.67 -0.001718 0.000045 1.069 0.008
w4c5	 2127.03 0.36 19.43 0.62 -0.003315 0.000095 0.906 0.007
w67c1	 -6310.53 1.19 4097.51 1.72 -0.004037 0.000070 0.399 0.004
w6c1	 -4229.36 1.18 4096.23 1.21 -0.000665 0.000047 1.027 0.011
w7c3	 2089.08 1.02 4098.61 0.57 -0.002159 0.000047 0.955 0.008
w9c2	 -4194.59 0.14 0.50 1.11 -0.000496 0.000024 1.020 0.008
w93c2	 -6268.34 0.60 16.08 1.53 0.000457 0.000078 0.970 0.008
